Sensor: flow; SENSIRION
| Manufacturer | SENSIRION |
| Type of sensor | flow |
| Symbol | Measuring range | Manufacturer series | Output conf. | Usup | Operating temperature | Oper. mode | Kit contents |
|---|---|---|---|---|---|---|---|
| [V DC] | [°C] | ||||||
| SFM3000-200 | -200...200slm | SFM | I2C | 4.75...5.25 | -20...80 | bidirectional | - |
| SFM3000-200C | -200...200slm | SFM | I2C | 4.75...5.25 | -20...80 | bidirectional | - |
| SFM4100-AIR | 0...20 SLPM | SFM | I2C | 3.5...9 | -20...80 | unidirectional | - |
| SFM3019-240-C | -10...240slm | SFM | I2C | 2.7...5.5 | 0...60 | unidirectional | - |
| SFM3020-160-C | -10...160 SLPM | SFM | analogue | 5 | 0...60 | unidirectional | - |
| ASF1400 | -400...400sccm | ASF | - | 7...18 | 0...70 | bidirectional | - |
| ASF1430 | -400...400sccm | ASF | - | 7...18 | 0...70 | bidirectional | - |
| LG16-0150D | 0...7µl/min | LG16 | I2C | 4...12 | 10...50 | bidirectional | - |
| LG16-0430D | 0...80µl/min | LG16 | I2C | 4...12 | 10...50 | bidirectional | - |
| LG16-0431D | 0...80µl/min | LG16 | I2C | 4...12 | 10...50 | bidirectional | - |
| LG16-1000D | 0...1000µl/min | LG16 | I2C | 4...12 | 10...50 | bidirectional | - |
| LG16-2000D | 0...5000µl/min | LG16 | I2C | 4...12 | 10...50 | bidirectional | - |
| LG16-2000HC-D | 0...80ml/min | LG16 | I2C | 4...12 | 10...50 | bidirectional | - |
| LG16-KIT | - | LG16 | I2C | 4...12 | 10...50 | bidirectional | Connectivity Kit |
| SEK-LD20-2600B | -1000...1000ml/h | LD20 | I2C | 3.2...3.8 | 5...45 | bidirectional | LD20-2600B x3; base station LD20 x3 |
| SEK-SFM3000 | -200...200slm | SFM | I2C | 5 | -20...80 | bidirectional | connection cable; SFM3000 x1 |
| SEK-SFM3019 | -10...240slm | SFM | I2C | 2.7...5.5 | -20...85 | unidirectional | connection cable; SFM3019 x1 |
| SEK-SFM3200 | -100...250slm | SFM | I2C | 4.75...5.25 | -10...50 | bidirectional | connection cable; SFM3200 x1 |
| SEK-SFM4100 | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | connection cable; SFM4100-AIR x1 |
| SFM3100-VC | -20...240slm | SFM | I2C | 4.75...5.25 | 5...60 | bidirectional | - |
| SFM3200-250 | -100...250slm | SFM | I2C | 4.75...5.25 | -10...50 | bidirectional | - |
| SFM3200-250-AW | -100...250slm | SFM | I2C | 4.75...5.25 | -10...50 | bidirectional | - |
| SFM3300-250-AW | -250...250slm | SFM | I2C | 4.75...5.25 | 5...50 | bidirectional | - |
| SFM3300-250-D | -250...250slm | SFM | I2C | 4.75...5.25 | 5...50 | bidirectional | - |
| SFM3400-33-AW | -33...33slm | SFM | I2C | 4.75...5.6 | 5...50 | bidirectional | - |
| SFM3400-33-D | -33...33slm | SFM | I2C | 4.75...5.6 | 5...50 | bidirectional | - |
| SFM4100-AIR-N2-D | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-AR-D | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-AR-LEGRIS | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-CO2-D | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-CO2-LEGRIS | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-N2O-D | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-N2O-LEGRIS | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-O2-D | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SFM4100-O2-LEGRIS | 0...20slm | SFM | I2C | 3.5...9 | -20...80 | bidirectional | - |
| SLF3S-0600F | -2000...2000µl/min | SLF3S | I2C | 3.2...3.8 | 5...50 | bidirectional | - |
| SLF3S-1300F | -40...40ml/h | SLF3S | I2C | 3.2...3.8 | 5...50 | bidirectional | - |
| SLF3XMOUNTINGCLAMP | - | SLF3S | - | - | - | - | - |
| KITSLF3S-0600F | - | SLF3S | - | - | - | - | - |
| KITSLF3S-1300F | - | SLF3S | - | - | - | - | - |
| SEK-SFM3003-300-CL | - | SFM | I2C | 2.7...5.5 | -20...85 | bidirectional | connection cable; SFM3003 x1 |
| SEK-SFM3013-300-CL | -30...300slm | SFM | I2C | 2.7...5.5 | -20...85 | bidirectional | connection cable; SFM3013 x1 |
| SEK-SFM3119-240-CL | - | SFM | - | - | - | - | - |
| SEK-SFM3XXX-AW/D | - | SFM | - | - | - | - | - |
| SFM3003-300-CE | -30...300slm | SFM | I2C | 2.7...5.5 | -20...85 | bidirectional | - |
| SFM3003-300-CL | -150...300slm | SFM | I2C | 2.7...5.5 | -20...85 | bidirectional | - |
| SFM3013-300-CL | -30...300slm | SFM | I2C | 2.7...5.5 | -20...85 | bidirectional | - |
| SFM3013-300-CLM | -30...300slm | SFM | I2C | 2.7...5.5 | -20...85 | bidirectional | - |
| SFM3119-240-CL | -10...240slm | SFM | I2C | 2.7...5.5 | -20...85 | bidirectional | connection cable; SFM3119 x1 |
| SFM4300-50-P | 0...50slm | SFM | I2C | 3...5.5 | -20...80 | bidirectional | - |
